• CN: 11-2187/TH
  • ISSN: 0577-6686
New Progress of Microfabrication Techniques for Slow Wave Structures at THz Frequencies
WU Chunya, GUO Chuangqiang, PEI Xudong, WANG Tingzhang, CHEN Ni, CHEN Mingjun
Journal of Mechanical Engineering . 2019, (7): 187 -198 .  DOI: 10.3901/JME.2019.07.187