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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
CONTROL SYSTEM FOR HIGH-SPEED AND ULTRA-PRECISION LINEAR MOTION BY DUAL STAGE
SONG Yixu;WANG Jianfa;YANG Kaiming;YIN Wensheng;ZHU Yu;JIA Peifa
. 2006, (
4
): 196 -200 .
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