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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
DEFINITION OF LINE EDGE ROUGH-NESS BASED ON METROLOGY
ZHAO Xuezeng;LI Hongbo;CHU Wei;XIAO Zengwen;LI Ning
. 2007, (
1
): 214 -218 .
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