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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Monitoring of Semiconductor Manufacturing Process Based on Functional Data Analysis
LI Min, XIE Xuan, CHEN Ze, YANG Mengyao, YANG Debin, JIANG Jing
Journal of Mechanical Engineering . 2018, (
16
): 62 -69 . DOI: 10.3901/JME.2018.16.062
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