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CN: 11-2187/TH
ISSN: 0577-6686
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中文
Pull-in Voltage Analysis of Electrostatically Actuated Stepped Micro-cantilever Beam
ZHU Junhua, SU Wei, LIU Renhuai, SONG Fangfang, HUANG Qinwen
Journal of Mechanical Engineering . 2018, (
8
): 217 -222 . DOI: 10.3901/JME.2018.08.217
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