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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
ELASTOMERIC IMPRINT LITHOGRAPHY PROCESS BASED ON DISTORTION REDUCTION BY PRECURE PRESS RELEASING
LIU Hongzhong;DING Yucheng;LU Bingheng;YIN Lei;JIANG Weitao;SHI Yongsheng;SHAO Jinyou
. 2007, (
8
): 86 -90 .
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