• CN: 11-2187/TH
  • ISSN: 0577-6686
Research on the Process Model for Focused Ion Beam Sputtering Etching Micro/Nanofabrication
LI Yuan, XING Yan, QIU Xiaoli
Journal of Mechanical Engineering . 2016, (5): 101 -106 .  DOI: 10.3901/JME.2016.05.101