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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Research on Ultra-precision Nanopositioning Stage
ZHANG Jinlong;LIU Yang;GUO Yiqian;LIU Jingnan;UCHIDA Yoshihisa
. 2011, (
9
): 187 -192 .
Copyright © Journal of Mechanical Engineering |
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