• CN: 11-2187/TH
  • ISSN: 0577-6686
Research on Dynamic Characteristics of Air Static Pressure Spindle for Silicon Wafer Grinding Machine
XU Jiahui, KANG Renke, ZHU Xianglong, DONG Zhigang, LI Meng
Journal of Mechanical Engineering . 2025, (5): 108 -116 .  DOI: 10.3901/JME.2025.05.108