• CN: 11-2187/TH
  • ISSN: 0577-6686
Research Progress of Vacuum Aerostatic Bearing
WU Jianwei, WANG Jiyao, ZHENG Jian, ZHAO Pengyue, GAO Xifeng, WEN Zhongpu
Journal of Mechanical Engineering . 2025, (5): 13 -25 .  DOI: 10.3901/JME.2025.05.013