• CN: 11-2187/TH
  • ISSN: 0577-6686
Mechanism Analysis and Experimental Verification of Ultrasonic Cavitation Assisted Diamond Wire Saw Cutting Monocrystalline Silicon
WANG Yan, HE Shun, CHEN Yizhang, JIANG Chen, QIAN Zhaofeng, CHEN Haoyi
Journal of Mechanical Engineering . 2024, (9): 114 -126 .  DOI: 10.3901/JME.2024.09.114