• CN: 11-2187/TH
  • ISSN: 0577-6686
Experimental Study on Friction-induced Chemical-mechanical Composite Machining (FCMM) of 4H-SiC Single Crystal
ZHANG Bonan, HUANG Hui, WU Min
Journal of Mechanical Engineering . 2024, (7): 401 -410 .  DOI: 10.3901/JME.2024.07.401