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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
A Molecular Dynamics Simulation on the Subsurface Damage Mechanism in the Nano-polishing Process of Silicon Carbide
HUA Dongpeng, ZHOU Qing, WANG Wan, LI Shuo, WANG Zhijun, WANG Haifeng
Journal of Mechanical Engineering . 2024, (
5
): 231 -240 . DOI: 10.3901/JME.2024.05.231
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