• CN: 11-2187/TH
  • ISSN: 0577-6686
Study on Automatic Gain Control and Phase Compensation Control for MEMS Resonant Pressure Sensors
WANG Songli, FANG Xudong, GAO Bonan, ZHAO Libo, TIAN Bian, LIN Qijing, ZHANG Zhongkai, RAO Hao, LI Yu, JIANG Zhuangde
Journal of Mechanical Engineering . 2024, (4): 82 -91 .  DOI: 10.3901/JME.2024.04.082