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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Study on Mechanical Properties of Nitrogen-doped ta-C Thin Films Prepared by Multi-stage Triggered Pulsed Arc Source Technology
ZHAO Dongcai, MA Zhanji, LIU Xingguang, ZHENG Jun, ZHANG Ziyang
Journal of Mechanical Engineering . 2023, (
24
): 108 -117 . DOI: 10.3901/JME.2023.24.108
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