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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis
TANG Hao, ZHANG He, ZHANG Dong, GAO Guibing, ZHENG Yu
Journal of Mechanical Engineering . 2023, (
21
): 110 -120 . DOI: 10.3901/JME.2023.21.110
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