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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Data-driven MIMO Fixed-structure Feedforward Control for Ultra-precision Motion Stages of Lithographic Scanners
LI Min, CHEN Taotao, LU Sen, YANG Kaiming, ZHU Yu, HU Chuxiong
Journal of Mechanical Engineering . 2023, (
21
): 99 -109 . DOI: 10.3901/JME.2023.21.099
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