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CN: 11-2187/TH
ISSN: 0577-6686
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中文
Surface Topography Evolution of Single Crystal Silicon in Laser Polishing
LI Tao, HUANG Weiqi, LONG Gui, YANG Sishuo, ZHANG Jianguo, XIAO Junfeng, XU Jianfeng
Journal of Mechanical Engineering . 2023, (
21
): 52 -64 . DOI: 10.3901/JME.2023.21.052
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