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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
State-of-the-art and Prospectives of Ultra-precision Grinding Technology for Semiconductor Substrates
GUO Dongming, KANG Renke
Journal of Mechanical Engineering . 2023, (
19
): 299 -329 . DOI: 10.3901/JME.2023.19.299
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