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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Advances in MEMS Integrated Design and Manufacturing Technology
YUAN Weizheng, CHANG Honglong, XIE Jianbing
Journal of Mechanical Engineering . 2023, (
19
): 176 -186 . DOI: 10.3901/JME.2023.19.176
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