• CN: 11-2187/TH
  • ISSN: 0577-6686
Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices
CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun
Journal of Mechanical Engineering . 2023, (19): 164 -175 .  DOI: 10.3901/JME.2023.19.164