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CN: 11-2187/TH
ISSN: 0577-6686
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中文
High-performance p+ Si/Au Thermopile-based Gas Flow Sensor in （111） Silicon and Its Packaging Technology
HUANG Tao, WANG Jiachou, LI Xinxin
Journal of Mechanical Engineering . 2023, (
2
): 30 -38 . DOI: 10.3901/JME.2023.02.030
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