• CN: 11-2187/TH
  • ISSN: 0577-6686
Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing
ZHANG Feihu, WANG Yiren, LIAO Defeng, REN Lele, LI Chen
Journal of Mechanical Engineering . 2022, (15): 46 -54 .  DOI: 10.3901/JME.2022.15.046