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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Effects of Additives and Heat Treatment on the Electrical Properties of Cobalt Interconnect Plating
CHEN Shuhui, ZHANG Mengyun, TAN Lingyue, LI Ming, HANG Tao
Journal of Mechanical Engineering . 2022, (
2
): 66 -75 . DOI: 10.3901/JME.2022.02.066
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