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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Research Status and Prospect on Polishing Technology of Large Size Single Crystal Diamond Substrate
WEN Hailang, XIAO Ping, LU Jing
Journal of Mechanical Engineering . 2021, (
22
): 157 -171 . DOI: 10.3901/JME.2021.22.157
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