• CN: 11-2187/TH
  • ISSN: 0577-6686
Recent Advance in Preparation and Ultra-precision Machining of New Generation Semiconductor Material of β-Ga2O3 Single Crystals
GAO Shang, LI Honggang, KANG Renke, HE Yiwei, ZHU Xianglong
Journal of Mechanical Engineering . 2021, (9): 213 -232 .  DOI: 10.3901/JME.2021.09.213