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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Mold Deformation in Roller-type Nanoimprint Lithography
LAN Hongbo, XU Fangchao, LI Zenghui, LIANG Sen, DING Yucheng
Journal of Mechanical Engineering . 2015, (
7
): 155 -161 . DOI: 10.3901/JME.2015.07.155
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