• CN: 11-2187/TH
  • ISSN: 0577-6686
Chemical Mechanical Polishing of Micro-structures on SSiC
ZHAO Qingliang, SUN Zhiyuan, GUO Bing
Journal of Mechanical Engineering . 2015, (15): 183 -189 .  DOI: 10.3901/JME.2015.15.183