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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Effect of Different Oxidizers on Chemical Mechanical Polishing of 6H-SiC
NI Zifeng, CHEN Guomei, XU Laijun, BAI Yawen, LI Qingzhong, ZHAO Yongwu
Journal of Mechanical Engineering . 2018, (
19
): 224 -231 . DOI: 10.3901/JME.2018.19.224
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