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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Rapid Detection on the Thickness of Sub-surface Damage Layer of Silicon
XU Le, GUO Jian, YU Bingjun, QIAN Linmao
Journal of Mechanical Engineering . 2016, (
11
): 108 -114 . DOI: 10.3901/JME.2016.11.108
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