• CN: 11-2187/TH
  • ISSN: 0577-6686
Design and Experimental Characterization of CMUTs Based on Eutectic Bonding Technology
LI Zhikang, ZHAO Libo, ZHAO Yihe, LI Jie, GUO Shuaishuai, LUO Guoxi, XU Tingzhong, LIU Zicheng, LI Xuejiao, JIANG Zhuangde
Journal of Mechanical Engineering . 2020, (13): 67 -76 .  DOI: 10.3901/JME.2020.13.067