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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Resonant Frequency Analysis of Capacitive Micromachined Ultrasonic Transducers (CMUTs) with Layered Membranes
LI Zhikang, ZHAO Libo, LI Jie, ZHAO Yihe, XU Tingzhong, LUO Guoxi, LI Xuejiao, GUO Shuaishuai, JIANG Zhuangde
Journal of Mechanical Engineering . 2019, (
24
): 11 -20 . DOI: 10.3901/JME.2019.24.011
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