• CN: 11-2187/TH
  • ISSN: 0577-6686
Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model
TIAN Yanbing, WANG Tao, WANG Meiling
Journal of Mechanical Engineering . 2015, (2): 198 -206 .  DOI: 10.3901/JME.2015.02.198