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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
METROLOGICAL AND ALGORITHM MODEL FOR NANO–SCALE LINEWIDTH MEASUREMENTS USING AFM
Zhao Xuezeng;Chu Wei;Theodore V Vorburger;Joseph Fu;John Song;Cattien V Nguyen
. 2004, (
4
): 50 -57 .
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