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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Frequency Robustness Design of Electrostatic Stiffness Resonant Micro Accelerometer Based on Error Sensitivity
ZHOU Wu;HE Xiaoping;SU Wei;ZHANG Fengtian;LI Bailin
. 2010, (
10
): 14 -18 .
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