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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
SCRATCH TEST OF DLC AND FLUORINATED DLC DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING METHOD AND THE INFLUENCE OF FLUORINE ON THE PROPERTIES OF DLC
Zhao Jiansheng;Xu Daqing;Choy Kwang-Leong
. 1999, (
5
): 80 -84 .
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