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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
ON THE CHARACTERISTICS OF Si MICRO-FABRICATION BY DIRECT ETCHING OF EXCIMER LASER
Yuan Weizheng;Ma Binghe;Li Xiaoying;Li Tiejun;Wang Lige;Liu Jingru
. 2000, (
3
): 107 -110 .
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