Abstract: Based on the principle of linear inchworm motor, a kind of unidirectional inverse clamping linear inchworm motor with triangulation amplification is proposed. It is composed of two clamping bodies, driving body and guide. The output displacement of the piezoelectric in clamping body is amplified by triangulation amplification. The guide is released under powering on and locked under power off. The mathematic model of inchworm motor is modeled by energy method in the field of mechanical vibration. The influences on the natural frequencies of driving body and clamping body by structural parameters are analysed. The structural parameters calculated in mathematic model are proved by finite element method(FEM) and experiments. The dynamic respond frequencies are tested with different loads.

Key words: inchworm, inverse clamping, piezoelectric motor