Journal of Mechanical Engineering ›› 2025, Vol. 61 ›› Issue (1): 305-325.doi: 10.3901/JME.2025.01.305
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ZHENG Lijuan, SUN Yong, XU Xiangqian, YU Juman, WANG Jun, WANG Chengyong
Received:
2024-02-19
Revised:
2024-06-22
Online:
2025-01-05
Published:
2025-02-26
CLC Number:
ZHENG Lijuan, SUN Yong, XU Xiangqian, YU Juman, WANG Jun, WANG Chengyong. Laser Micromachining of Heterogeneous Multi-layer Composite Materials:A Review[J]. Journal of Mechanical Engineering, 2025, 61(1): 305-325.
[1] PRISMARK News. Prismark[EB/OL]. [2023-05-01]. https://www.prismark.com/what-s-new. [2] 杨威. 封装基板微盲孔成孔技术[J]. 电子工艺技术,2022,43(6):338-341. YANG Wei. Micro blind via forming technology of packaging substrate[J]. Electronics Process Technology,2022,43(6):338-341. [3] 颜庙青. 印制电路板激光微孔工艺研究[D]. 武汉:华中科技大学,2009. YAN Miaoqing. A dissertation submitted in partial fulfillment of the requirements for the degree of master of engineering[D]. Wuhan:Huazhong University of Science and Technology,2009. [4] KAWASUJI Y,FUJIMOTO J,KOBAYASHI M,et al. Deep ultraviolet excimer laser processing for the micro via hole on semiconductor package[J]. Journal of Laser Applications,2020,32(2):022076. [5] 刘晓东,陈亮,王曦照,等. 紫外激光微铣削Al2O3陶瓷盲孔的工艺研究[J]. 激光与光电子学进展,2021,58(5):203-210. LIU Xiaodong,CHEN Liang,WANG Xizhao,et al. Micromilling blind holes in Al2O3 ceramics using UV laser[J]. Progress in Laser and Optoelectronics,2021,58(5):203-210. [6] 李松松. 高密度互连印制电路板通孔与精细线路制作技术研究[D]. 成都:电子科技大学,2016. LI Songsong. Research on HDI PCB though hole and fine line production technology[D]. Chengdu:University of Electronic Science and Technology,2016. [7] XI Z,GHITA O R,EVANS K E. Effect of recyclate PTFE/GF laminate incorporation on the dielectric and mechanical properties of PTFE/GF composites using a novel manufacturing process[J]. Journal of Applied Polymer Science,2011,122(4):2467-2477. [8] GAO Zhisen,SHI Hongyan,TAO Sha,et al. Study on the mechanism affecting the quality of micro-hole in ultrasonic-assisted drilling of high-speed circuit boards[J]. The International Journal of Advanced Manufacturing Technology,2022,124(7-8):2527-2544. [9] ZHOU G,HE W,WANG S,et al. A novel nitric acid etchant and its application in manufacturing fine lines for PCBs[J]. IEEE Transactions on Components Packaging and Manufacturing Technology,2010,33(1):25-30. [10] 王庆. 大功率LED散热封装用铝基印刷电路板研究[D]. 杭州:浙江大学,2011. WANG Qing. Study on aluminum core printed circuit board applying in high power LED packaging[D]. Hangzhou:Zhejiang University,2011 [11] 翟中生,郭钊,汪于涛,等. 不同偏振态下飞秒激光在FPC上打孔特性研究[J]. 应用激光,2017,37(2):262-267. ZHAI Zhongsheng,GUO Zhao,WANG Yutao,et al. The characteristics of femtosecond laser drilling on FPC with different polarizatinog states[J]. Applied Laser,2017,37(2):262-267. [12] 黄欣,王成勇,何宇星,等. 异质多元多层印制电路板精密孔机械加工[J].机械工程学报,2023,59(3):283-307. HUANG Xin,WANG Chengyong,HE Yuxing,et al. Drilling of heterogeneous multi-layer printed circuit boards:A review[J]. Journal of Mechanical Engineering,2023,59(3):283-307. [13] Von der LINDE D,SOKOLOWSKI-TINTEN K,BIALKOWSKI J. Laser–solid interaction in the femtosecond time regime[J]. Applied Surface Science,1997,109:1-10. [14] 郭敏超,王明娣,张胜江,等. FR-4覆铜板飞秒激光微孔加工工艺研究[J]. 中国激光,2020,47(12):135-143. GUO Minchao,WANG Mingdi,ZHANG Shengjiang,et al. Techniques for femtosecond laser processing of micro-holes in FR-4 copper clad laminate[J]. Chinese Journal of Lasers,2020,47(12):135-143. [15] RETHFELD B,SOKOLOWSKI-TINTEN K,Von Der LINDE D,et al. Timescales in the response of materials to femtosecond laser excitation[J]. Applied Physics A,2004,79:767-769. [16] DAUSINGER F,HUGEL H,KONOV V I. Micromachining with ultrashort laser pulses:From basic understanding to technical applications[C]// ALT'02 International Conference on Advanced Laser Technologies. SPIE,2003,5147:106-115. [17] 刘院省. 金属材料脉冲激光刻蚀微加工的基础研究[D]. 北京:北京工业大学,2007. LIU Yuansheng. The basic study on the pulsed laser ablating metals[D]. Beijing:Beijing University Of Technology,2007. [18] DABBY F,PAEK U C. High-intensity laser-induced vaporization and explosion of solid material[J]. IEEE Journal of Quantum Electronics,1972,8(2):106-111. [19] MARTYNIUK M M. The role of the phase explosion of metals in the explosive electron emission process[J]. Radiotekhnikai Elektronika,1980,25:157-167. [20] ELSIED A M,DIEFFENBACH P C,DIWAKAR P K,et al. Nanosecond laser-metal ablation at different ambient conditions[J]. Spectrochimica Acta Part B:Atomic Spectroscopy,2018,143:26-31. [21] 张恒. 纳秒激光诱导若干金属材料微结构及其应用研究[D]. 苏州:苏州大学,2010. ZHANG Heng. Research on fabrication of microstructures on metals induced by nanosecond laser and its applications[D]. Suzhou:Soochow University,2008. [22] 孙立华. 陶瓷激光打孔技术研究[D]. 长春:长春理工大学,2007. SUN Lihua. The reaserch of laser drilling on ceramics[D]. Changchun:Changchun University of Science and Technology,2007. [23] 马南钢,王希军,丁华东,等. 碳化硼厚板的激光切割工艺及其机制[J]. 中国激光,2007,34(10):1441-1445. MA Nangang,WANG Xijun,DING Huadong,et al. Laser cutting processing and mechanism for thick boron plate[J]. Chinese Journal of Lasers,2007,34(10):1441- 1445. [24] 陈壹华. CO2激光成孔技术在HDI的应用研究[J]. 应用激光,2007(2):144-147. CHEN Yihua. Research on the application of forming-hole technology by CO2 laser on HDI[J]. APPLIED LASER,2007,27(2):144. [25] ZHOU G,LI W,XIANG Q,et al. Copper induced direct CO2 laser drilling blind hole with the aid of brown oxidation for PCB CCL[J]. Applied Surface Science,2019,479:512-518. [26] MEDVEDEV N,MILOV I. Nonthermal phase transitions in metals[J]. Scientific Reports,2020,10(1):12775. [27] KUDRYASHOV S I,SAMOKHVALOV A A,GOLUBEV Y D,et al. Dynamic all-optical control in ultrashort double-pulse laser ablation[J]. Applied Surface Science,2021,537:147940. [28] 贾威,罗义鸣,宋有建,等. 脉冲激光加工高分子材料[J]. 纳米技术与精密工程,2015,13(3):205-210. JIA Wei,LUO Yiming,SONG Youjian,et al. Laser micromachining of polymer[J]. Nanotechnology and Precision Engineering,2015,13(3):205-210. [29] 欧长劲,秦才宝,姜献峰,等. 非垂直激光切割能量分布研究[J]. 激光与光电子学进展,2017,54(4):246-253. OU Changjin,QIN Caibao,JIANG Xianfeng,et al. Study on energy distribution of non-vertical laser cutting[J]. Laser & Optoelectronics Progress,2017,54(4):246-253. [30] YUNG K C,ZENG D W,YUE T M. XPS investigation of Upilex-S polyimide ablated by 355 nm Nd:YAG laser irradiation[J]. Applied Surface Science,2001,173(3-4):193-202. [31] 李家峰,王楠,白晶莹,等. 脉冲激光改性聚醚醚酮及表面金属化技术研究[J]. 表面技术,2022,51(3):371-379. LI Jiafeng,WANG Nan,BAI Jingying,et al. Pulse laser modification of poly-ether-ether-ketone for surface metallization[J]. Surface Technology,2022,51(3):371-379. [32] 林素颖,廖小杰,韩冰. 纳秒激光诱导聚酰亚胺薄膜周期性结构的产生[J]. 红外与激光工程,2022,51(2):94-100. LIN Suying,LIAO Xiaojie,HAN Bing. Nanosecond laser-induced periodic structures on polyimide film[J]. Infrared and Laser Engineering,2022,51(2):94-100. [33] 张晓,刘凯,王明娣,等. 基于飞秒激光的覆铜板刻蚀工艺[J]. 光学学报,2019,39(12):235-242. ZHANG Xiao,LIU Kai,WANG Mingdi,et al. Etching technology for copper-clad laminates based on femtosecond laser[J]. Acta Optica Sinica,2019,39(12):235-242. [34] HAM S S,LEE H. Surface characteristics of polymers with different absorbance after UV picosecond pulsed laser processing using various repetition rates[J]. Polymers,2020,12(9):2018. [35] QIN Z,AI J,DU Q,et al. Superhydrophobic polytetrafluoroethylene surfaces with accurately and continuously tunable water adhesion fabricated by picosecond laser direct ablation[J]. Materials & Design,2019,173:107782. [36] 陈振威. CO2激光加工玻璃的实验研究[D]. 武汉:华中科技大学,2012. CHEN Zhenwei. Experimental study on glass processing by CO2 laser[D]. Wuhan:Huazhong University of Science and Technology,2012. [37] 贾贤石. 氧化铝陶瓷复合激光打孔研究[D]. 武汉:华中科技大学,2022. JIA Xianshi. Combined pulse laser drilling of alumina ceramic[D]. Wuhan:Huazhong University of Science and Technology,2022. [38] 姜海涛,杨子轩,赵万芹,等. 氧化铝陶瓷基板紫外纳秒激光打孔工艺研究[J]. 电子机械工程,2020,36(4):36-41. JIANG Haitao,YANG Zixuan,ZHAO Wanqin,et al. Research on nanosecond pulse laser drilling processing of alumina ceramic substrate[J]. Electro-Mechanical Engineering,2020,36(4):36-41. [39] NEDIALKOV N,SAWCZAK M,JENDRZEJEWSKI R,et al. Analysis of surface and material modifications caused by laser drilling of AlN ceramics[J]. Applied Surface Science,2007,254(4):893-897. [40] WANG H J,CHEN Q,LIN D T,et al. Effect of scanning pitch on nanosecond laser micro-drilling of silicon nitride ceramic[J]. Ceramics International,2018,44(12):14925-14928. [41] KACAR E,MUTLU M,AKMAN E,et al. Characterization of the drilling alumina ceramic using Nd:YAG pulsed laser[J]. Journal of Materials Processing Technology,2009,209(4):2008-2014. [42] HANON M M,AKMAN E,OZTOPRAK B G,et al. Experimental and theoretical investigation of the drilling of alumina ceramic using Nd:YAG pulsed laser[J]. Optics & Laser Technology,2012,44(4):913-922. [43] 卞华栋,戴晔,叶俊毅,等. 紧聚焦飞秒脉冲与石英玻璃相互作用过程中的电子动量弛豫时间研究[J]. 物理学报,2014,63(7):170-176. BIAN Huadong,DAI Ye,YE Junyi,et al. Analysis of electron momentum relaxation time in fused silica using a tightly focused femtosecond laser pulse[J]. Acta Phys. Sin.,2014,63(7):074209. [44] 魏健,张彬,刘晖,等. 飞秒激光烧蚀石英微孔的时间分辨阴影成像[J]. 中国激光,2019,46(5):248-252. WEI Jian,ZHANG Bin,LIU Hui,et al. Time-Resolved shadowgraphic imaging of femtosecond laser ablated micro-holes in silica glass[J]. Chinese Journal of Lasers,2019,46(5):248-252. [45] 杨雪. 飞秒激光加工玻璃微结构的机理与工艺参数研究[D]. 天津:天津工业大学,2021. YANG Xue. Study on the mechanism and technological parameters of glass microstructure processing by femtosecond laser[D]. Tianjing:Tiangong University,2021. [46] 王禹茜,张军战,刘永胜,等. 飞秒激光工艺参数对加工TiC陶瓷微孔的影响[J]. 中国激光,2014,41(10):106-112. WANG Yuxi,ZHANG Junzhan,LIU Yongsheng,et al. Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling[J]. Chinese Journal of Lasers,2014,41(10):106-112. [47] STOIAN R,ASHKENASI D,ROSENFELD A,et al. The dynamics of ion expulsion in ultrashort pulse laser sputtering of Al2O3[J]. Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms,2000,166:682-690. [48] 孟雪. 飞秒激光烧蚀固体材料的过程及表面形貌研究[D]. 济南:山东师范大学,2015. MENG Xue. The study of femtosecond laser ablation process and surface morphology of solid materials[D]. Jinan:Shandong Normal University,2015. [49] 徐梦廓. 激光加工高密度PCB的研究[D]. 柳州:广西工学院,2011. XU Mengkuo. The research of laser machining in high-density PCB[D]. Liuzhou:Guangxi University of Science and Technology,2011. [50] BOIN N,JEONGWON Y,SEUNGBOO J. Effect of laminating parameters on the adhesion property of flexible copper clad laminate with adhesive layer[J]. International Journal of Adhesion and Adhesives,2010,30(1):30-35. [51] PARK J H,LEE J H,SOON A. Organics on oxidic metal surfaces:a first-principles DFT study of PMDA and ODA fragments on the pristine and mildly oxidized surfaces of Cu(111)[J]. Physical Chemistry Chemical Physics,2016,18(31):21893-21902. [52] 黄欣. 柔性电路板飞秒激光精密加工机理研究[D]. 广州:广东工业大学,2022. HUANG Xin. Femtosecond laser precision machining mechanism of flexible circuit boards[D]. Guangzhou:Guangdong University of Technology,2022. [53] 陈志城,刘文鑫,吕凤洋,等. 355 nm皮秒激光对柔性电路板盲孔加工的研究[J]. 应用激光,2022,42(5):58-65. CHEN Zhicheng,LIU Wenxin,LÜ Fengyang,et al. Research on blind hole machining of flexible circuit board by 355 nm picosecond laser[J]. Applied Laser,2022,42(5):58-65. [54] SUN M,EPPELT U,HARTMANN C,et al. Damage morphology and mechanism in ablation cutting of thin glass sheets with picosecond pulsed lasers[J]. Optics & Laser Technology,2016,80:227-236. [55] OBATA K,HIROGAKI T,AOYAMA E,et al. Cu-direct laser drilling of blind via-hole in multi-layer PWBs:Process visualization using high-speed camera images[C]// Key Engineering Materials. Trans Tech Publications Ltd,2012,516:30-35. [56] ZHANG F,DUAN J,ZENG X,et al. UV laser microprocessing and post chemical etching on ultrathin Al2O3 ceramic substrate[J]. Journal of the European Ceramic Society,2011,31(9):1631-1639. [57] FANG X Y,YUNG K C. Copper direct drilling with TEA hbox CO2 laser in manufacture of high-density interconnection printed circuit board[J]. IEEE Transactions on Electronics Packaging Manufacturing,2006,29(3):145-149. [58] BHASKAR A,PHILIPPE J,BRAUD F,et al. Large-area femtosecond laser milling of silicon employing trench analysis[J]. Optics & Laser Technology,2021,138:106866. [59] XU H,HU J. Modeling of the material removal and heat affected zone formation in CFRP short pulsed laser processing[J]. Applied Mathematical Modelling,2017,46:354-364. [60] LEONE C,GENNA S,TAGLIAFERRI F,et al. Experimental investigation on laser milling of aluminium oxide using a 30 W Q-switched Yb:YAG fiber laser[J]. Optics & Laser Technology,2016,76:127-137. [61] LEONE C,BASSOLI E,GENNA S,et al. Experimental investigation and optimisation of laser direct part marking of Inconel 718[J]. Optics and Lasers in Engineering,2018,111:154-166. [62] LI S S,WANG Y L,LI B J,et al. Femtosecond laser selective ablation of Cu/Ag double-layer metal films for fabricating high-performance mesh-type transparent conductive electrodes and heaters[J]. Optics Communications,2021,483:126661. [63] 施克明,王明娣,陈添禹,等. 飞秒激光扫描刻蚀覆铜板工艺及质量研究[J]. 应用激光,2018,38(1):81-88. SHI Keming,WANG Mingdi,CHEN Tianyu,et al. Study on technology and quality of etching copper clad laminate with femtosecond laser[J]. Applied Laser,2018,38(1):81-88. [64] 姚燕生,陈庆波,汪俊,等. 氮化硅陶瓷水射流辅助激光精密加工[J]. 光学精密工程,2018,26(11):2723-2731. YAO Yansheng,CHEN Qingbo,WANG Jun,et al. Water-jet assisted laser precision processing of Si3N4 ceramics[J]. Optics and Precision Engineering,2018,26(11):2723-2731. [65] ISSELIN J C,ALLONCLE A P,AUTRIC M. On laser induced single bubble near a solid boundary:Contribution to the understanding of erosion phenomena[J]. Journal of Applied physics,1998,84(10):5766-5771 [66] 段凌云,黄传真,刘盾,等. 激光辅助水射流加工砷化镓晶片微槽的实验研究[J]. 中国机械工程,2023,34(10):1172-1183. DUAN Lingyun,HUANG Chuanzhen,LIU Dun,et al. An experimental investigation on laser assisted waterjet microgrooving of GaAs wafer[D]. China Mechanical Engineering,2023,34(10):1172-1183. [67] 傅茜,张菲,蒋明,等. 1064 nm和355 nm激光扫描刻蚀覆铜板工艺及质量研究[J]. 激光技术,2014,38(4):435-440. FU Xi,ZHANG Fei,JIANG Ming,et al. Study on technology and quality of etching copper clad laminate with 1064 nm and 355 nm laser[J]. Laser Technology,2014,38(4):435-440. [68] FRANZ D,HÄFNER T,KUNZ T,et al. Ultrashort Pulsed laser drilling of printed circuit board materials[J]. Materials,2022,15(11):3932. [69] KIM K R,CHO J H,LEE N Y,et al. High-precision and ultrafast UV laser system for next-generation flexible PCB drilling[J]. Journal of Manufacturing Systems,2016,38:107-113. [70] ŽEMAITIS A,GAIDYS M,BRIKAS M,et al. Advanced laser scanning for highly-efficient ablation and ultrafast surface structuring:Experiment and model[J]. Scientific Reports,2018,8(1):17376. [71] FINGER J,KALUPKA C,REININGHAUS M. High power ultra-short pulse laser ablation of IN718 using high repetition rates[J]. Journal of materials processing technology,2015,226:221-227. [72] LONG F,HE W,CHEN Y,et al. Application of ultraviolet laser in high density interconection micro blind via[C]// 20105th International Microsystems Packaging Assembly and Circuits Technology Conference. IEEE,2010:1-3. [73] 张菲,段军,曾晓雁,等. 355 nm紫外激光器加工多层柔性线路板盲孔[J]. 红外与激光工程,2010,39(1):143-146.ZHANG Fei,DUAN Jun,ZENG Xiaoyan,et al. Drilling blind holes on multi-layer FPC board with a 355 nm UV laser[J]. Infrared and Laser Engineering,2010,39(1):143-146. [74] 王守绪,何雪梅,董颖韬,等. UV激光控深铣槽在刚挠结合印制板中的应用研究[J]. 印制电路信息,2015,23(5):22-24. WANG Shouxu,HE Xuemei,DONG Yingtao,et al. Application research on slot-cutting by UV laser in rigid-flex PCB[J]. Printed Circuit Information,2015,23(5):22-24. [75] 张云龙,孙树峰,王茜,等. 激光加工微孔质量的研究[J]. 激光与光电子学进展,2021,58(19):20-39. ZHANG Yunlong,SUN Shufeng,WANG Xi,et al. Reasearch on quality of micro-holes fabricated by laser drilling[J]. Laser & Optoelectronics Progress,2021,58(19):20-39. [76] DAUSINGER F. Femtosecond technology for precision manufacturing:Fundamental and technical aspects[J]. Proceedings of SPIE,2003,4830:471-478. [77] BRUSBERG L,QUEISSER M,GENTSCH C,et al. Advances in CO2-laser drilling of glass substrates[J]. Physics Procedia,2012,39:548-555. [78] 倪超. FR-4覆铜板飞秒激光打孔及微细线路刻蚀研究[D]. 苏州:苏州大学,2020. NI Chao. Study of femtosecond laser drilling and etching micro line on FR-4 copper clad laminate[D]. Suzhou:Soochow University,2020. [79] LEE H M,CHOI J H,MOON S J. Machining characteristics of glass substrates containing chemical components in femtosecond laser helical drilling[J]. International Journal of Precision Engineering and Manufacturing-Green Technology,2021,8:375-385. [80] 任云鹏,程力,周王凡,等. 铝合金飞秒激光单步法和三步法旋切打孔技术研究[J]. 中国激光,2022,49(22):226-235. REN Yunpeng,CHENG Li,ZHOU Wangfan,et al. Femtosecond laser single-step and three-step trepanning drilling technology of aluminum alloy[J]. Chinese Journal of Laser,2022,49(22):226-235. [81] LO T M,YOUNG J S. Improvements of productivity for PCB drilling by laser driller machine[J]. International journal of Precision Engineering and Manufacturing,2014,15:1575-1581. [82] KWAK H,HAN S C,KOO J C,et al. A clustering based path planning for UV laser galvanometric scanning drilling machine using spatial tessellations with A[C]// 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE,2014:871-876. [83] WANG L,REN N,WANG Y,et al. Microstructure comparative investigation of deep hole in super alloy by trepanning and percussion laser processing[J]. Nanoscience and Nanotechnology Letters,2017,9(4):407-415. [84] LI Q,YANG L,HOU C,et al. Surface ablation properties and morphology evolution of K24 nickel based superalloy with femtosecond laser percussion drilling[J]. Optics and Lasers in Engineering,2019,114:22-30. [85] WANG M,YANG L,ZHANG S,et al. Experimental investigation on the spiral trepanning of K24 superalloy with femtosecond laser[J]. Optics & Laser Technology,2018,101:284-290. [86] XIE J,YAN J,ZHU D,et al. Atomic‐level insight into the formation of subsurface dislocation layer and its effect on mechanical properties during ultrafast laser micro/nano fabrication[J]. Advanced Functional Materials,2022,32(15):2108802. [87] CHANG Y J,KUO C L,WANG N Y. Magnetic assisted laser micromachining for highly reflective metals[J]. Journal of Laser Micro Nanoengineering,2012,7(3):254. [88] LU Y,SUN G F,WEN D P,et al. Effects of applying electric and magnetic fields on laser drilling[J]. The International Journal of Advanced Manufacturing Technology,2016,84(9):2293-2300. [89] BALAMURUGAN S,MANIKANDAN C B,BALAMURUGAN P. A study on magnetic field assisted laser percussion drilling and its effect on surface integrity[J]. Archives of Materials Science and Engineering,2018,94(1):35-40. [90] WANG H,HU Y,NING F,et al. Ultrasonic vibration- assisted laser engineered net shaping of Inconel 718 parts:Effects of ultrasonic frequency on microstructural and mechanical properties[J]. Journal of Materials Processing Technology,2020,276:116395. [91] RAFTAR O R,AMIRI S,KHAJEHZADEH M,et al. The influence of ultrasonic vibration amplitude and magnetic field intensity on microstructural characteristics in laser drilling of Ti6Al4V[J]. Proceedings of the Institution of Mechanical Engineers,Part C:Journal of Mechanical Engineering Science,2022,236(5):2363-2379. [92] JIAO L,ZHENG H,ZHANG Y,et al. Picosecond laser drilling of silicon with applied voltage[J]. SN Applied Sciences,2019,1(1):1-7. [93] ZHOU J,JIAO H,HUANG Y,et al. The mechanism of micro-cracks formation in ultrasonic-assisted water confined laser micromachining silicon[J]. Optics Communications,2021,488:126745. [94] 王银飞,朱浩,张朝阳,等. 旋转磁场辅助激光加工微孔的机理及试验研究[J]. 中国激光,2022,49(16):7-15. WANG Yinfei,ZHU Hao,ZHANG Chaoyang,et al. Mechanism and experimental research of magnetic field rotation assisted laser machining of micro-holes[J]. Chinese Journal of Laser,2022,49(16):7-15. [95] 彭国豪. 磁场辅助激光加工铜基散热基板微孔研究[D]. 广州:广东工业大学,2022. PENG Guohao. Magnetic field-assisted laser processing of micro-hole in copper-based thermal substrates[D]. Guangzhou:Guangdong University of Technology,2022. [96] 郑李娟,王成勇,黄兵. 一种多能场辅助印制电路板激光加工装置及方法,中国:CN117226307A[P]. 2023-12-15. ZHENG Lijuan,WANG Chengyong,HUANG Bing. A multi energy field assisted laser processing device and method for printed circuit boards,China:CN117226307A [P]. 2023-12-15. [97] XIA K,REN N,WANG H,et al. Analysis for effects of ultrasonic power on ultrasonic vibration-assisted single- pulse laser drilling[J]. Optics and Lasers in Engineering,2018,110:279-287. [98] WANG H,XU Y,LIU J,et al. Magnet-assisted laser hole-cutting in magnesium alloys with and without water immersion[J]. Journal of Manufacturing Processes,2021,61:539-560. [99] WANG H,XU Y,ZHU S,et al. Water-based helical laser hole-cutting in nickel super-alloy GH4049 assisted by longitudinal and transverse magnetic fields with/without ultrasonic assistance[J]. Optics and Lasers in Engineering,2020,128:105985. [100] PARK J K,YOON J W,CHO S H. Vibration assisted femtosecond laser machining on metal[J]. Optics and Lasers in Engineering,2012,50(6):833-837. [101] ZANG X,LIU Z T,XU Y S,et al. Spatial light modulation for femtosecond laser manufacturing:Current developments and challenges[J]. Science China Technological Sciences,2023:1-13. [102] 张超,李敏,叶柏臣,等. 飞秒激光时空整形的电子动态调控微孔加工[J]. 光电工程,2022,49(2):36-49. ZHANG Chao,LI Min,YE Baichen,et al. Electrons dynamics control micro-hole drilling using temporally/ spatially shaped femtosecond laser[J]. Opto-Electronic Engineering,2022,49(2):36-49. [103] BALAGE P,BONAMIS G,LAFARGUE M,et al. Advances in femtosecond laser GHz-Burst drilling of glasses:Influence of Burst shape and duration[J]. Micromachines,2023,14(6):1158. [104] ZHAO W,WANG L. Microdrilling of through-holes in flexible printed circuits using picosecond ultrashort pulse laser[J]. Polymers,2018,10(12):1390. |
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