Research Progress in Etching Fabrication of Groove Wick Structure of Flat Heat Pipe

doi:10.3901/JME.2023.24.140

Abstract

Abstract: Flat heat pipe is widely used in the field of high heat flux electronic devices due to its advantages of large heat transfer area, high performance and strong geometric adaptability. With the development of high performance, integration and miniaturization of electronic devices, the flat heat pipe tends to be ultra-thin, and the grooved wick structure with stable structure, light weight and small size becomes the preferred solution to solve the problem of heat dissipation of flat heat pipe in limited space. The traditional groove processing technology has high cost and limited groove processing size. Etching technology has the advantages of high processing efficiency and wide range of processing structure size, which has gradually become the main processing method of flat heat pipe groove wick structure. The types and applications of flat heat pipe and the characteristics of different etching technologies are introduced in detail. The research progress on the fabrication of groove wick structure of flat heat pipe by etching technology at home and abroad are summarized. Furthermore, the shortcomings that existed on the etching process of groove wick structure are pointed out and it is also suggested that more efforts should be made to what in the future.

Key words: etching processing, flat heat pipe, groove wick structure, microstructure manufacture

CLC Number:

TK124

WU Chunxia, TANG Heng, ZHANG Shiwei, SUN Yalong, WU Xiaoyu, TANG Yong. Research Progress in Etching Fabrication of Groove Wick Structure of Flat Heat Pipe[J]. Journal of Mechanical Engineering, 2023, 59(24): 140-155.

References

[1] LIU L,YUAN B,YANG X P,et al. Experimental study of a novel loop heat pipe with a vapor-driven jet injector and a boiling pool[J]. International Journal of Heat and Mass Transfer,2022,184:122267.
[2] SAJJAD U,SADEGHIANJAHROMI A,ALI H M,et al. Enhanced pool boiling of dielectric and highly wetting liquids-A review on surface engineering[J]. Applied Thermal Engineering,2021,195:117074.
[3] 汤勇,唐恒,万珍平,等. 超薄微热管的研究现状及发展趋势[J]. 机械工程学报,2017,53(20):131-144. TANG Yong,TANG Heng,WAN Zhenping,et al. Development status and perspective trend of ultra-thin micro heat pipe[J]. Journal of Mechanical Engineering,2017,53(20):131-144.
[4] 汤勇,孙亚隆,唐恒,等. 柔性热管的研究现状与发展趋势[J]. 机械工程学报,2022,58(10):265-279. TANG Yong,SUN Yalong,TANG Heng,et al. Development status and perspective trend of flexible heat pipe[J]. Journal of Mechanical Engineering,2022,58(10):265-279.
[5] WEN R,XU S,LEE Y C,et al. Capillary-driven liquid film boiling heat transfer on hybrid mesh wicking structures[J]. Nano Energy,2018,51:373-382.
[6] 李红传,纪献兵,郑晓欢,等. 锥形毛细芯平板热管传热特性研究[J]. 机械工程学报,2015,51(24):132-138. LI Hongchuan,JI Xianbing,ZHENG Xiaohuan,et al. Study on heat transfer properties of flat heat pipe with conical capillary wicks[J]. Journal of Mechanical Engineering,2015,51(24):132-138.
[7] ZHOU G H,LI J,JIA Z Z. Power-saving exploration for high-end ultra-slim laptopcomputers with miniature loop heat pipe cooling module[J]. Applied Energy,2019,239:859-875.
[8] 况旭,魏昕,谢小柱,等. 激光制备微热管复合沟槽吸液芯及毛细压力验证[J]. 机械设计与制造,2021,(3):145-148. KUANG Xu,WEI Xin,XIE Xiaozhu,et al. The processing of micro heat pipecomposite grooves on the micro heat pipe by laser and capillary pressure verification[J]. Machinery Design & Manufacture,2021,(3):145-148.
[9] LIANG G T,MUDAWAR I. Review of spray cooling-Part 1. Single-phase and nucleate boiling regimes,and critical heat flux[J]. International Journal of Heat and Mass Transfer,2017,115:1174-1205.
[10] ZU S F,LIAO X N,HUANG Z,et al. Visualization study on boiling heat transfer of ultra-thin flat heat pipe with single layer wire mesh wick[J]. International Journal of Heat and Mass Transfer,2021,173:121239.
[11] CHANG C,HAN Z Y,HE X Y,et al. 3D printed aluminum flat heat pipes with micro grooves for efficient thermal management of high power LEDs[J]. Scientific Reports,2021,11(1):8255.
[12] HU H,XU X M,LI R Z,et al. Study the heat dissipation performance of lithium-ion battery liquid cooling system based on flat heat pipe[J]. Fire and Materials,2022,46(1):168-180.
[13] ZHOU J,LIU L,YANG X P,et al. Visualization research on influencing factors of flat heat pipes[J]. Applied Thermal Engineering,2022,207:118193.
[14] GERASIMOV Y F,MAIDANIK Y F,SHCHEGOLEV G T,et al. Low-temperature heat pipes with separate channels for vapor and liquid[J]. Journal of engineering physics,1976,28(6):683-685.
[15] HUI M,LUO L,BADIEI A,et al. Performance investigation of a micro-channel flat separated loop heat pipe system for data centre cooling[J]. International Journal of Low-Carbon Technologies,2021,16(1):98-113.
[16] ZHANG Z K,ZHAO R Z,LIU Z C,et al. Application of biporous wick in flat-plate loop heat pipe with long heat transfer distance[J]. Applied Thermal Engineering,2021,184:116283.
[17] DOMICIANO K G,KRAMBECK L,FLOREZ J P M,et al. Thin diffusion bonded flat loop heat pipes for electronics. Fabrication, modelling and testing[J]. Energy Conversion and Management,2022,255:115329.
[18] TANG H,TANG Y,WAN Z P,et al. Review of applications and developments of ultra-thin micro heat pipes for electronic cooling[J]. Applied Energy,2018,223:383-400.
[19] SREEJITH K P,SHARMA A K,BASU P K,et al. Etching methods for texturing industrial multi-crystalline silicon wafers:A review[J]. Solar Energy Materials and Solar Cells,2022,238:111531.
[20] ZHAN X Y,LUO Y L,WANG Z Y,et al. Formation of multifaceted nano-groove structure on rutile TiO₂ photoanode for efficient electron-hole separation and water splitting[J]. Journal of Energy Chemistry,2022,65:19-25.
[21] 张寒. 超薄平板热管的制备及其传热性能研究[D]. 南京:南京航空航天大学,2019. ZHANG Han. Preparation and thermal performance study of ultra-thin flat heat pipe[D]. Nanjing:Nanjing University of Aeronautics and Astronautics,2019.
[22] 王树立. 基于图案化微结构及表面的微纳流体控制[D]. 长春:吉林大学,2018. WANG Shuli. Micro/nanofluidic control based on patterned microstructures and surfaces[D]. Changchun:Jilin University,2018.
[23] BAO Y D,LIU W,ZHAO Y Q,et al. Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl-2/BCl3/O-2/Ar chemistry[J]. Journal of Vacuum Science & Technology B,2022,40(2):022205.
[24] CHENG P F,WANG H L,MULLER B,et al. Photo-thermoelectric conversion using black silicon with enhanced light trapping performance far beyond the band edge absorption[J]. Acs Applied Materials & Interfaces,2021,13(1):1818-1826.
[25] SONG Y X,WANG C,DONG X R,et al. Controllable superhydrophobic aluminum surfaces with tunable adhesion fabricated by femtosecond laser[J]. Optics and Laser Technology,2018,102:25-31.
[26] SUN K,YANG H,XUE W,et al. Anti-biofouling superhydrophobic surface fabricated by picosecond laser texturing of stainless steel[J]. Applied Surface Science,2018,436:263-267.
[27] SUN Y L,SHUAI M,ZHANG S W,et al. Hierarchically 3D-textured copper surfaces with enhanced wicking properties for high-power cooling[J]. Applied Thermal Engineering,2020,178:115650.
[28] ZHAO X,ZHENG Y H,DAI H H,et al. Wet-chemistry:A useful tool for deriving metal-organic frameworks toward supercapacitors and secondary batteries[J]. Advanced Materials Interfaces,2022,9(13):2102595.
[29] ZHANG M F,YANG M,OKIGAWA Y,et al. Patterning of graphene using wet etching with hypochlorite and UV light[J]. Scientific Reports,2022,12(1):4541.
[30] XIE X,WENG Q,LUO Z,et al. Thermal performance of the flat micro-heat pipe with the wettability gradient surface by laser fabrication[J]. International Journal of Heat and Mass Transfer,2018,125:658-669.
[31] YOU R,LIU Y Q,HAO Y L,et al. Laser fabrication of graphene-based flexible electronics[J]. Adv Mater,2020,32(15):e1901981.
[32] LIU T Q,YAN W T,WU W,et al. Thermal performance enhancement of vapor chamber with modified thin screen mesh wick by laser etching[J]. Case Studies in Thermal Engineering,2021,28:101525.
[33] KALITA S,SEN P,SEN D,et al. Experimental study of nucleate pool boiling heat transfer on microporous structured by chemical etching method[J]. Thermal Science and Engineering Progress,2021,26:101114.
[34] ZHANG K Y,LV S Z,ZHOU Q,et al. CoOOH nanosheets-coated g-C3N4/CuInS2 nanohybrids for photoelectrochemical biosensor of carcinoembryonic antigen coupling hybridization chain reaction with etching reaction[J]. Sensors and Actuators B. Chemical,2020,307:127631.
[35] YUAN B,ZHANG Y H,LIU L,et al. Heat transfer enhancement on micro-pin-finned surfaces under high-frequency reciprocating flow[J]. Applied Thermal Engineering,2020,175:115378.
[36] IL SHIM D,CHOI G,LEE N,et al. Enhancement of pool boiling heat transfer using aligned silicon nanowire arrays[J]. Acs Applied Materials & Interfaces,2017,9(20):17596-17603.
[37] CHEN G,TANG Y,DUAN L H,et al. Thermal performance enhancement of micro-grooved aluminum flat plate heat pipes applied in solar collectors[J]. Renewable Energy,2020,146:2234-2242.
[38] ZHANG S W,LIN L,CHEN G,et al. Experimental study on the capillary performance of aluminum micro-grooved wicks with reentrant cavity array[J]. International Journal of Heat and Mass Transfer,2019,139:917-927.
[39] HUANG G H,TANG Y,WANG P T,et al. Thermal characterisation of micro flat aluminium heat pipe arrays by varying working fluid and inclination angle[J]. Applied Sciences-Basel,2018,8(7):1052.
[40] NIRGUDE V V,SAHU S K. Enhancement of nucleate boiling heat transfer using structured surfaces[J]. Chemical Engineering and Processing-Process Intensification,2017,122:222-234.
[41] RAHMAN M M,MCCARTHY M. Effect of length scales on the boiling enhancement of structured copper surfaces[J]. Journal of Heat Transfer-Transactions of the Asme,2017,139(11):111508.
[42] DHADDA G,HAMED M,KOSHY P. Electrical discharge surface texturing for enhanced pool boiling heat transfer[J]. Journal of Materials Processing Technology,2021,293:117083.
[43] YEOM T,SIMON T,ZHANG T,et al. Enhanced heat transfer of heat sink channels with micro pin fin roughened walls[J]. International Journal of Heat and Mass Transfer,2016,92:617-627.
[44] MARQUES C,KELLY K W. Fabrication and performance of a pin fin micro heat exchanger[J]. Journal of Heat Transfer-Transactions of the Asme,2004,126(3):434-444.
[45] WANG Y Q,LYU S S,LUO J L,et al. Copper vertical micro dendrite fin arrays and their superior boiling heat transfer capability[J]. Applied Surface Science,2017,422:388-393.
[46] WANG Z Y,ZHANG N,JIAO B B,et al. Investigation of thermal characteristics and two-phase flows of a star-shape thin heat pipe[J]. Applied Thermal Engineering,2016,103:9-15.
[47] LIU C,HU D H,LI Q,et al. Vapor chamber with two-layer liquid supply evaporator wick for high-heat-flux devices[J]. Applied Thermal Engineering,2021,190:116803.
[48] 于慧文,崔文宇,郝婷婷,等. 梯度润湿表面脉动热管传热性能的研究[J]. 化工进展,2020,39(11):4375-4383. YU Huiwen,CUI Wenyu,HAO Tingting,et al. Heat transfer performance of wettability gradient surface oscillating heat pipe[J]. Chemical Industry and Engineering Progress,2020,39(11):4375-4383.
[49] PETTIGREW K,KIRSHBERG J,YERKES K,et al. Performance of a MEMS based micro capillary pumped loop for chip- level temperature control[C]//the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001),Jan 21-25,2001,Interlaken,Switzerland:IEEE,2001:427-430.
[50] MOON S H,HWANG G,EDA. Development of the micro capillary pumped loop for electronic cooling[C]//proceedings of the 13th International Workshop on Thermal Investigation of ICs and Systems,Sep 17-19,2007,Budapest,HUNGARY:IEEE,2007:72-76.
[51] MA A X,WEI J J,YUAN M Z,et al. Enhanced flow boiling heat transfer of FC-72 on micro-pin-finned surfaces[J]. International Journal of Heat and Mass Transfer,2009,52(13-14):2925-2931.
[52] SHARRATT S,PENG C,JU Y S. Micro-post evaporator wicks with improved phase change heat transfer performance[J]. International Journal of Heat and Mass Transfer,2012,55(21-22):6163-6169.
[53] LI D,WU G S,WANG W,et al. Enhancing flow boiling heat transfer in microchannels for thermal management with monolithically-integrated silicon nanowires[J]. Nano Letters,2012,12(7):3385-3390.
[54] YANG K S,LIN C C,SHYU J C,et al. Performance and two-phase flow pattern for micro flat heat pipes[J]. International Journal of Heat and Mass Transfer,2014,77:1115-1123.
[55] ZAMURUYEV K O,BARDAWEEL H K,CARRON C J,et al. Continuous droplet removal upon dropwise condensation of humid air on a hydrophobic micropatterned surface[J]. Langmuir,2014,30(33):10133-10142.
[56] HAMIDNIA M,LUO Y,LI Z X,et al. Capillary and thermal performance enhancement of rectangular grooved micro heat pipe with micro pillars[J]. International Journal of Heat and Mass Transfer,2020,153:119581.
[57] WAN W,DENG D X,HUANG Q S,et al. Experimental study and optimization of pin fin shapes in flow boiling of micro pin fin heat sinks[J]. Applied Thermal Engineering,2017,114:436-449.
[58] DENG D X,WAN W,QIN Y,et al. Flow boiling enhancement of structured microchannels with micro pin fins[J]. International Journal of Heat and Mass Transfer,2017,105:338-349.
[59] VOGLAR J,GREGORCIC P,ZUPANCIC M,et al. Boiling performance on surfaces with capillary-length-spaced one- and two-dimensional laser-textured patterns[J]. International Journal of Heat and Mass Transfer,2018,127:1188-1196.
[60] ZHANG Y,XIA Z,SONG B Z,et al. Experimental analysis on the loop heat pipes with different microchannel evaporators[J]. Applied Thermal Engineering,2020,178:115547.
[61] LOU D Y,LI T,LIANG E K,et al. Superhydrophobic/superhydrophilic hybrid copper surface enhanced micro heat pipe by using laser selective texturing[J]. Ecs Journal of Solid State Science and Technology,2021,10(11):113005.
[62] 唐恒,汤勇,万珍平,等. 平板铝热管微沟槽吸液芯的制备及毛细性能研究[J]. 机械工程学报,2019,55(6):186-193. TANG Heng,TANG Yong,WANG Zhenping,et al. Fabrication and capillary performance of micro-grooved wicks for aluminium flat-plate heat pipes[J]. Journal of Mechanical Engineering,2019,55(6):186-193.
[63] KANG S W,HUANG D L. Fabrication of star grooves and rhombus grooves micro heat pipe[J]. Journal of Micromechanics and Microengineering,2002,12(5):525-531.
[64] QIAN B T,SHEN Z Q. Fabrication of superhydrophobic surfaces by dislocation-selective chemical etching on aluminum,copper,and zinc substrates[J]. Langmuir,2005,21(20):9007-9009.
[65] WANG X D,ZOU L L,LIU J G,et al. Experimental investigation of copper-grooved micro heat pipes (MHPs)[J]. Journal of Solid State Lighting,2014,1(1):14.
[66] CHEN S W,HSIEH J C,CHOU C T,et al. Experimental investigation and visualization on capillary and boiling limits of micro-grooves made by different processes[J]. Sensors and Actuators a-Physical,2007,139(1-2):78-87.
[67] DONG L N,QUAN X J,CHENG P. An experimental investigation of enhanced pool boiling heat transfer from surfaces with micro/nano-structures[J]. International Journal of Heat and Mass Transfer,2014,71:189-196.
[68] GONG B Y,YANG H C,WU S H,et al. Nanotexturing-enhanced heat transfer and interfacial evaporation for energy-efficient solar-thermal water desalination[J]. International Journal of Heat and Mass Transfer,2022,186:122462.
[69] BAI P,ZHOU L P,DU X Z. Effects of liquid film thickness and surface roughness ratio on rapid boiling of water over copper plates[J]. International Communications in Heat and Mass Transfer,2021,120:105036.
[70] THAKUR S S,CHANDEL S S,KAKORIA A,et al. Enhancement in pool boiling heat transfer of ethanol and nanofluid on novel supersonic nanoblown nanofiber textured surface[J]. Experimental Heat Transfer,2021,35(4):516-532.
[71] MAHAPATRA P S,GHOSH A,GANGULY R,et al. Key design and operating parameters for enhancing dropwise condensation through wettability patterning[J]. International Journal of Heat and Mass Transfer,2016,92:877-883.
[72] XIN F,MA T,CHEN Y T,et al. Study on chemical spray etching of stainless steel for printed circuit heat exchanger channels[J]. Nuclear Engineering and Design,2019,341:91-99.
[73] BANG S,RYU S,KI S,et al. Superhydrophilic catenoidal aluminum micropost evaporator wicks[J]. International Journal of Heat and Mass Transfer,2020,158:120011.
[74] LI Y,ZHENG Y,CHEN Y,et al. The exact regulation of temperature evolutions for droplet impact on ultrathin cold films at superhydrophilic surface[J]. Chemical Engineering Science,2019,193:205-216.
[75] SHIOGA T,MIZUNO Y,NAGANO H. Operating characteristics of a new ultra-thin loop heat pipe[J]. International Journal of Heat and Mass Transfer,2020,151:119436.
[76] SHIOGA T,ABE T,NAGANO H. Submillimeter-thick loop heat pipes fabricated using two-layer copper sheets for cooling electronic applications[J]. Applied Thermal Engineering,2020,181:116018.
[77] DAMOULAKIS G,MEGARIDIS C M. Wick-free paradigm for high-performance vapor-chamber heat spreaders[J]. Energy Conversion and Management,2022,253:115138.
[78] KWAK H J,KIM J H,MYUNG B S,et al. Behavior of pool boiling heat transfer and critical heat flux on high aspect-ratio microchannels[J]. International Journal of Thermal Sciences,2018,125:111-120.
[79] DING C S,SONI G,BOZORGI P,et al. A flat heat pipe architecture based on nanostructured titania[J]. Journal of Microelectromechanical Systems,2010,19(4):878-84.
[80] LEWIS R,LIEW L A,XU S S,et al. Microfabricated ultra-thin all-polymer thermal ground planes[J]. Science Bulletin,2015,60(7):701-706.