Mutual Integration of Triboelectric Nanogenerator and Plasma Technology

doi:10.3901/JME.2022.21.171

Abstract

Abstract: The concepts of plasma and triboelectric nanogenerator (TENG), development history and their classification are briefly introduced. The development status of these two green technologies are reviewed. On this basis, the review is carried out from two aspects:surface modification of friction materials for TENG by plasma and plasma induced by TENG. The different plasma treatment methods to improve the output performance of TENG are reviewed, especially focus on the plasma etching and ion implantation/irradiation. In addition, the different electrode configuration excited by TENG, and their related applications including optimization of output performance, field emission, mass spectrometry analysis, substance synthesis and environmental applications are reviewed. Finally, the combination of plasma and TENG is summarized, and the problems existing in the coordinated development of these two technologies for the state-of-art are analysed, which will certainly helpful for the integrated development of the plasma and TENG.

Key words: plasma, triboelectric nanogenerator, green technologies, plasma etching, mass spectrometry, substance detection

CLC Number:

TH117
O53

CHEN Shubin, WANG Huiyan, LI Yinglong, WANG Ruixue, KONG Xianghao, XIA Zhangchuan. Mutual Integration of Triboelectric Nanogenerator and Plasma Technology[J]. Journal of Mechanical Engineering, 2022, 58(21): 171-185.

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