Study on EDM Method Based on Strip Electrode for Micro-channel Structure

doi:10.3901/JME.2022.19.283

Abstract

Abstract: To address the challenges of machining metal microchannel structures with large thickness and high aspect ratio, a strip electrode EDM method is proposed to efficiently fabricate microchannel structures on metal substrates using a strip electrode with a thickness of 30-100 μm. The mechanism of strip electrode EDM is investigated, the motion model of the strip electrode in the machining gap is established, the main factors affecting the motion of the strip electrode are analysed, a strip electrode EDM wire processing device is built, experimental studies on the machining of microchannel structures with strip electrodes are carried out, and the basic process laws of strip electrode EDM is obtained. The successful machining of a reactor structure with 200 microchannels and a 44×45 microheater array structure using the strip electrode EDM method demonstrates that strip electrode EDM can achieve efficient machining of high-volume microchannel structures with narrow width (below 100 μm), large thickness (above 35 mm), high depth to width ratio (above 10) and high accuracy (standard deviation of seam width within 3 μm), and the related method and technology are expected to be promoted and applied in the fields of micro moulds, micro radiators and micro reactors.

Key words: strip electrode, wire-EDM, microchannel

CLC Number:

TG661

CHU Xuyang, ZHOU Kesheng, ZHUANG Weihuang, ZHOU Wei. Study on EDM Method Based on Strip Electrode for Micro-channel Structure[J]. Journal of Mechanical Engineering, 2022, 58(19): 283-292.

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