Graphene Nanopore Sensor Fabrication and Single Molecule Translocation Form Detection

doi:10.3901/JME.2022.05.190

Abstract

Abstract: Graphene is the thinnest two-dimensional material, with 0.335 nm thick. Compared with traditional solid-state nanopore,graphene nanopore sensor has high detection resolution. Graphene membrane chip is fabricated by MEMS and two-dimensional material wet transfer technology. Raman and helium ion microscopy are used to detect the quality of graphene membrane after transfer. Subsequently, graphene nanopore with 20 nm diameter is fabricated on a single layer graphene membrane by helium ion beam etching. The measured current-voltage relationship of the graphene nanopore sensor is consistent with the classical conductivity theory of nanopore. The results show that the single layer graphene nanopore sensor can detect three kinds of Bovine Serum Albumin(BSA) translocate morphology, i.e. horizontal, vertical and rotary, with blocking current values of 1200 pA, 150 pA and 650 p A.Signal of multiple molecules passing through graphene nanopore is also identified, the BSA molecules were arranged in a triangle shape through the graphene nanopore.

Key words: graphene, nanopore sensor, focused ion beam, BSA detection

CLC Number:

TB383

YUAN Zhi-shan, DAI Min, ZHENG Li-juan, WANG Cheng-yong. Graphene Nanopore Sensor Fabrication and Single Molecule Translocation Form Detection[J]. Journal of Mechanical Engineering, 2022, 58(5): 190-197.

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