Research Progress of Structured Nano Thin-films Based Micro/Nanojoining Technologies

doi:10.3901/JME.2022.02.017

Abstract

Abstract: With the increasing demand for the miniaturization of structural system and functional devices, high performance heterogeneous integration at small scale is becoming an urgent need for the precise instruments design and device development. In order to meet the requirements for high quality, mass production and green manufacturing in micro/nano fabrication process, unstable and metastable nanostructured thin films have been widely studied and used in advanced materials joining, due to their excellent size effect and surface/interface structures. The reaction activity of each component and phase stability within the nanostructured thin films of different combinations (e.g. metal, semiconductor, oxide) have been illustrated. It has shown that these designed nanostructured thin films have been widely used in the heterogenous materials integration in microelectronics and astronautics. Meanwhile, with the high reaction activity of nanofilm, nanostructured nanolayers as the brazing fillers, have also shown great potential in joining of hard materials and heat-sensitive materials.

Key words: nanostructured films, micro/nanojoining, surface/interface structure, thermal stability, reaction activity

CLC Number:

TG47

LIN Lushan, LIU Lei, ZOU Guisheng, LI Zhuguo. Research Progress of Structured Nano Thin-films Based Micro/Nanojoining Technologies[J]. Journal of Mechanical Engineering, 2022, 58(2): 17-25.

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