• CN: 11-2187/TH
  • ISSN: 0577-6686

Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (22): 157-171.doi: 10.3901/JME.2021.22.157

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Research Status and Prospect on Polishing Technology of Large Size Single Crystal Diamond Substrate

WEN Hailang, XIAO Ping, LU Jing   

  1. Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021
  • Received:2020-11-04 Revised:2021-07-05 Online:2021-11-20 Published:2022-02-28

Abstract: Non-metallic inclusions in the matrix of metal parts are inevitable and have a serious impact on the mechanical properties of the matrix. Forging deformation is a main way to make non-metallic inclusions break and disperse in the metal matrix. Taking the common hard Al2O3 inclusions in steel as the research object, metal samples containing Al2O3 inclusions with different porosities are prepared by powder metallurgy technology combined with 3D printing cladding forming technology. The forging experiments of metal samples containing Al2O3 inclusions under a series of deformation conditions are carried out. The effects of porosity of inclusions and forging process parameters (deformation temperature, deformation speed and deformation path) on the crushing and dispersion behavior of Al2O3 inclusions are studied by observing the morphology of Al2O3 inclusions after deformation. The results show that the higher the porosity of inclusions, the more likely to be broken. Lowering the deformation temperature or increasing the deformation speed can promote the crushing and dispersion of Al2O3 inclusions with higher porosity; for Al2O3 inclusions with lower porosity, increasing the deformation temperature is the main way to aggravate the degree of crushing. At the same time, the complexity of the deformation path can significantly increase the crushing and promote the further dispersion of Al2O3 inclusions in the metal matrix.

Key words: single crystal diamond, polishing, material removal rate, surface roughness, removal mechanism

CLC Number: