Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (22): 157-171.doi: 10.3901/JME.2021.22.157
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WEN Hailang, XIAO Ping, LU Jing
Received:
2020-11-04
Revised:
2021-07-05
Online:
2021-11-20
Published:
2022-02-28
CLC Number:
WEN Hailang, XIAO Ping, LU Jing. Research Status and Prospect on Polishing Technology of Large Size Single Crystal Diamond Substrate[J]. Journal of Mechanical Engineering, 2021, 57(22): 157-171.
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