Abstract: For a long time, because of the specific characteristics of size, structure and service environment for thin film materials, the research on the failure behavior, life prediction and reliability assessment for thin films obviously lag behind the development of the film categories and application. Fatigue life prediction methods of thin films are reviewed, and the unidirectional cyclic loading method and the cantilever beam bending method are analyzed. And a new method of fatigue life prediction, i.e. nano dynamic load method which includes the continuous stiffness method and nano-impact test method, is introduced in detail. This method can excellently simulate the actual service environment; and also can realize split-phase test, in situ fixed-point detection of various function modules, and quantitative analysis of the fatigue properties of thin films. The research status of fatigue damage mechanism and life prediction models for the thin films is discussed. The research on the failure process and the quantitative analysis will be focused for the investigation of fatigue failure mechanism of thin film materials.

Key words: damage mechanism, dynamic load method, failure prediction, fatigue of thin films, research status