• CN:11-2187/TH
  • ISSN:0577-6686

机械工程学报 ›› 2018, Vol. 54 ›› Issue (10): 36-42.doi: 10.3901/JME.2018.10.036

• 仪器科学与技术 • 上一篇    下一篇

典型位移传感器分类研究与时栅传感器特点分析

彭东林1,2, 付敏1,2, 陈锡侯1,2, 刘小康1,2, 汤其富1,2, 武亮1,2   

  1. 1. 重庆理工大学机械检测技术与装备教育部工程研究中心 重庆 400054;
    2. 重庆理工大学时栅传感及先进检测技术重庆市重点实验室 重庆 400054
  • 收稿日期:2017-06-26 修回日期:2017-12-06 出版日期:2018-05-20 发布日期:2018-05-20
  • 通讯作者: 彭东林(通信作者),男,1952年出生,教授,博士研究生导师,重庆市首批学术学科带头人、重庆市"两江学者"。主要研究方向为计算机辅助测试技术与仪器、智能传感器。E-mail:pdl@cqut.edu.cn
  • 作者简介:付敏,男,1981年出生,博士,副研究员。主要研究方向为智能仪器与传感器。E-mail:fum_0@cqut.edu.cn
  • 基金资助:
    国家自然科学基金(51475063,51675071)、重庆市科委(sy40002)和重庆市“两江学者”计划资助项目。

Classification Study on Typical Displacement Sensors and Analysis on the Characteristics of Time Grating Sensors

PENG Donglin1,2, FU Min1,2, CHEN Xihou1,2, LIU Xiaokang1,2, TANG Qifu1,2, WU Liang1,2   

  1. 1. Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education, Chongqing University of Technology, Chongqing 400054;
    2. Chongqing Key Laboratory of Time-grating Sensing and Advanced Testing Technology, Chongqing University of Technology, Chongqing 400054
  • Received:2017-06-26 Revised:2017-12-06 Online:2018-05-20 Published:2018-05-20

摘要: 对现有广泛使用的主要位移传感器和全新原理的时栅位移传感器,按其测量基准、测量原理、数学模型和刻划媒介等方面的不同进行了科学分类,分析其间的联系与差别、优势与不足、各自适用的场合等技术特征。介绍时栅在测量原理上的先进性,经权威部门——中国测试技术研究院检定:目前圆式、直线式时栅的测量精度分别达到±0.8″、±0.5 μm/m,分辨力分别达到0.1″、0.1 μm。为了使时栅的测量精度向纳米级测量精度迈进,对基于电场和光场原理的纳米时栅进行了分析。另外对时栅的衍生技术-寄生式时栅及其在极端特殊环境下的应用前景进行了简单介绍。

关键词: 光栅, 时栅, 位移传感器, 旋转变压器

Abstract: The mostly applied displacement sensors and time grating sensors with novel measurement principles are classified according to measurement standard, measurement principles, mathematical models and manufacturing materials. In addition, the similarity, the differences, the benefits and the disadvantages of these sensors are analyzed, as well as their applications. The advances in measurement principles of time grating sensors are introduced, the testing results of time grating from National Institute of Measurement and Testing Technology(NIMTT), an institute of legal verification of China, are that the indication errors are within ±0.8″ in any 0°-360° measuring range for angular time grating sensors, and the accuracy of linear time grating is ±0.5 μm/m. The resolutions can reach 0.1″and 0.1 μm, respectively. In order to further improve the accuracy of time grating up to nanometer scale, the nanometer time grating sensors based on the principles of electrical field and optical field are analyzed. In addition, derivative technology of time grating sensors, parasitic time grating sensors, and its application prospects for extreme environments are introduced.

Key words: displacement sensors, optical grating sensors, resolvers, time grating

中图分类号: