Prediction of Surface Roughness in Chemical Mechanical Polishing of FeCrAl

doi:10.3901/JME.2023.23.310

Abstract

Abstract: FeCrAl alloy has become one of the most critical candidate materials used on accident-tolerant fuel (ATF) cladding and fourth-generation power reactors, which requires excellent irradiation resistance and anti-corrosion ability in high-temperature steam. However, it is difficult to achieve an ultra-smooth surface during chemical mechanical polishing (CMP) owing to the grain boundary step. Therefore, a roughness prediction model is established to clarify the formation and evolution mechanism of the grain boundary step. Firstly, the volume of material removal by a single abrasive and the number of effective abrasives are calculated during the process. Then, the stable grain boundary step between the grain orientations is obtained based on the elastic-plastic contact theory, and the prediction of stable roughness S_a is realized. Finally, experiments are conducted to validate the model. The results show that the trend of the calculation is consistent with stable surface roughness obtained by the experiments, and the error between them is within 17%. The parameters are optimized based on the prediction model, and an ultra-smooth surface is obtained with the stable surface roughness S_a 1.2 nm.

Key words: FeCrAl alloy, CMP, surface roughness, predictive model, grain boundary step

CLC Number:

TG175

GUO Jiang, YANG Zhe, ZHANG Pengfei, LI Linguang, YU Xuewen, PAN Bo. Prediction of Surface Roughness in Chemical Mechanical Polishing of FeCrAl[J]. Journal of Mechanical Engineering, 2023, 59(23): 310-319.

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