Ultra-precision Cutting Characteristics of Convex Blazed Gratings with Electroless NiP

doi:10.3901/JME.2023.21.121

Abstract

Abstract: The performance of Offner-type spectrum imaging systems is directly impacted by the cutting surface quality of convex spherical blazed gratings. Microcrystalline aluminum 6061 surfaces chemically coated with NiP are used as the convex spherical blazed grating material. Firstly, the cutting performance of the electroless NiP is studied by means of material property characterization. Secondly, the minimum undeformed chip thickness of the electroless NiP is determined by simulating the two-dimensional wedge-shaped workpiece cutting process and the three-dimensional convex blazed grating cutting process, and the influence of the tool tilt angle on the chip flow and stress distribution is studied. Finally, the cutting surface quality of convex spherical blazed grating is compared by changing the feed direction. The results show that the electroless NiP exhibits obvious amorphous characteristics, the element distribution on the surface and inside of the coating is uniform, and the roughness value Ra of the turning plane can reach 0.794 nm. The minimum undeformed chip thickness of the electroless NiP is about 30.52 nm, and the increase in the tool tilt angle is responsible for the greater susceptibility to burr formation on the steep side. The feed direction along the steep side direction can improve the top burr of the grating and improve the contour accuracy, but there is no improvement on the blaze surface roughness, and the final blaze surface roughness Ra is less than 3 nm.

Key words: ultra-precision machining, convex spherical blazed gratings, surface quality, amorphous NiP, cutting characteristics

CLC Number:

TG591

PENG Xiaoqiang, LI Huang, WANG Yueming, GUAN Chaoliang, HU Hao, LAI Tao, XU Chao. Ultra-precision Cutting Characteristics of Convex Blazed Gratings with Electroless NiP[J]. Journal of Mechanical Engineering, 2023, 59(21): 121-130.

References

[1] 唐恒,汤勇,伍晓宇,等. 表面功能结构制造研究的新进展与发展趋势[J]. 机械工程学报, 2022, 58(11):183-199. TANG Heng, TANG Yong, WU Xiaoyu, et al. New progress and development trend of manufacturing of functional surface structure[J]. Journal of Mechanical Engineering, 2022, 58(11):183-199.
[2] HUTLEY M C. Diffraction gratings[M]. New York:Academic Press, 1982.
[3] BORN M, WOLF E. Principles of optics[M]. New York:Macmillan, 2005.
[4] LOEWEN E G, POPOV E. Diffraction gratings and applications[M]. Florida:CRC Press, 2018.
[5] 王丁陆,张大伟,徐邦联,等. 凸面光栅的设计与制作研究进展[J]. 激光与光电子学进展, 2021, 58(11):26-37. WANG Dinglu, ZHANG Dawei, XU Banglian, et al. Research progress in design and fabrication of convex grating[J]. Laser & Optoelectronics Progress, 2021, 58(11):26-37.
[6] FANG F Z, ZHANG X D, WECKENMANN A, et al. Manufacturing and measurement of freeform optics[J]. CIRP Annals, 2013, 62(2):823-846.
[7] BRINKSMEIER E, SCHÖNEMANN L. Generation of discontinuous microstructures by diamond micro chiseling[J]. CIRP Annals, 2014, 63(1):49-52.
[8] XU D, OWEN J D, PAPA J C, et al. Design, fabrication, and testing of convex reflective diffraction gratings[J]. Optics Express, 2017, 25(13):15252.
[9] TAN N Y J, ZHOU G, LIU K, et al. Diamond shaping of blazed gratings on freeform surfaces[J]. Precision Engineering, 2021, 72:899-911.
[10] 郑志忠,杨忠,修连存. 高衍射效率短波红外凸面闪耀光栅的研制与应用[J]. 光学学报, 2020, 40(12):59-67. ZHANG Zhizhong, YANG Zhong, XIU Liancun. Development and application of shortwave infrared convex blazed grating with high diffraction efficiency[J]. Acta Optica Sinica, 2020, 40(12):59-67.
[11] DE C C, MOREAU V, JAMOYE J F, et al. ELOIS:An innovative spectrometer design using a free-form grating[C]//Optical Systems Design 2015:Optical Design and Engineering VI. International Society for Optics and Photonics, 2015, 9626:96261O.
[12] BOURGENOT C, CALCINES A, SHARPLES R. New opportunities of freeform gratings using diamond machining[C]//Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation III. International Society for Optics and Photonics, 2018, 10706:1070626.
[13] 祝惠一,毛建辉,尹凌鹏. 7075铝合金化学镀对镍磷合金镀膜组织和性能的影响[J]. 中国冶金, 2022, 32(1):58-63. ZHU Huiyi, MAO Jianhui, YIN Lingpeng. Effect of electroless for 7075 aluminum alloy on microstructure and properties of Ni-P alloy coatings[J]. China Metallurgy, 2022, 32(1):58-63.
[14] SHOU Y C, YU S L, HSIAO H L, et al. Mechanical properties and deformation behavior of amorphous nickel-phosphorous films measured by nanoindentation test[J]. Metallurgical and Materials Transactions, 2006, 37(10):2939.
[15] SHEN Y F, XUE W Y, LIU Z Y, et al. Nanoscratching deformation and fracture toughness of electroless Ni-P coatings[J]. Surface and Coatings Technology, 2010, 205(2):632-640.
[16] SHEN Y F, LIU W N, SUN X, et al. Plastic deformation in an amorphous Ni-P coating[J]. Metallurgical and Materials Transactions A, 2012, 43:1610-1620.
[17] YAN J, OOWADA T, ZHOU T, et al. Precision machining of microstructures on electroless-plated NiP surface for molding glass components[J]. Journal of Materials Processing Technology, 2009, 209(10):4802-4808.
[18] JIANG X, LI B, YANG J, et al. An approach for analyzing and controlling residual stress generation during high-speed circular milling[J]. The International Journal of Advanced Manufacturing Technology, 2013, 66:1439-1448.
[19] ZHOU T, RUAN B, YU Q, et al. Improvement of dimensional accuracy and surface quality of microlens arrays by a profile cutting method[J]. The International Journal of Advanced Manufacturing Technology, 2021, 115(5-6):1877-1888.
[20] LI H, PENG X, GUAN C, et al. Ultra-precision cutting and characterization of reflective convex spherical blazed grating elements[J]. Micromachines, 2022, 13(7):1115.
[21] SON S M, LIM H S, AHN J H. Effects of the friction coefficient on the minimum cutting thickness in micro cutting[J]. International Journal of Machine Tools and Manufacture, 2005, 45(4-5):529-535.
[22] KAWASEGI N, KAWASHIMA T, MORITA N, et al. Effect of texture shape on machining performance of textured diamond cutting tool[J]. Precision Engineering, 2019, 60:21-27.
[23] LI H, XU Z. Micro burrs in machining original molds of an optical functional film with a triangular pyramidal texture[J]. Journal of Micromechanics and Microengineering, 2021, 31(6):065003.