Research Progress of High Precision Ranging Technology Based on Optical Frequency Comb

doi:10.3901/JME.2023.20.244

Abstract

Abstract: Precision measurement technology is an important supporting technology of advanced manufacturing. Precision laser measurement technology is the most widely used in geometric measurement, especially in online and high-precision measurement. For advanced manufacturing higher requirements, new laser measurement technology continues to develop, such as the ranging technology based on optical frequency comb, its wide spectrum, narrow pulse width, high frequency stability of optical frequency comb as the light source, through the coherence detection can achieve high precision and wide range of absolute distance measurement. At the same time, the improvement of micro/nano manufacturing process and the development of optoelectronic integration technology make it possible to further meet the needs of high stability, instrument integration and online measurement in the field measurement environment. Based on the demand of high precision ranging in advanced manufacturing, the basic principle, performance index and application development of optical frequency comb ranging scheme are reviewed. Firstly, the basic characteristics of optical frequency comb and the related research of new microcavity soliton optical frequency comb are described. Then, the measurement principle and research progress of frequency domain and time domain ranging technology of optical frequency comb are introduced in detail, including dispersion interference method, synthetic wavelength method, reference arm scanning method, repeat frequency scanning method and dual-comb asynchronous optical sampling method. Finally, the development process and optimization direction of the existing technology are analyzed and compared, and the relevant instrument development and field application are summarized and prospected.

Key words: optical frequency comb, soliton microcomb, high precision ranging, laser interferometry, advanced manufacture

CLC Number:

TN249

JIA Linhua, ZHENG Jihui, ZHANG Fumin, QU Xinghua. Research Progress of High Precision Ranging Technology Based on Optical Frequency Comb[J]. Journal of Mechanical Engineering, 2023, 59(20): 244-260.

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